Theory and advantages of 'CEM' Vapour Control
At room temperature the liquid (precursor fluid for chemical reactions
or water for humidification purposes) is drawn from a container with an
inert gas blanket, or membrane, and measured by a liquid mass flow meter.
The required flow rate is controlled to the setpoint value by a control
valve (C) forming an integral part of the patented liquid flow and carrier
gas mixing valve (M). The then formed mixture is subsequently led into
the evaporator to achieve total evaporation (E). This explains the abbreviation
of CEM viz.: Control - Evaporation - Mixing, the 3 basic functions of Bronkhorst's
Liquid Delivery System.