mini CORI-FLOW™ Series ML120
Low Flow Coriolis Mass Flow Meter / Controller

World's smallest low flow Coriolis Instruments

mini CORI-FLOW™ series mass flow meter / mass flow controller are precise and compact instruments, based on the Coriolis measureing principle. mini CORI-FLOW™ utilizes a uniquely shaped, single loop tube, forming part of an oscillating system, providing superior flow measurement performance. When a fluid flows through the tube, Coriolis forces cause a variable phase shift, which is detected by sensors and fed into the integrally mounted pc-board. The resulting output signal is strictly proportional to the real mass flow rate. Coriolis mass flow measurement is fast, accurate, easy to install and inherently bi-directional. The mini CORI-FLOW™ features density and temperature of the fluid as secondary outputs.  

The new Bronkhorst ML120 Coriolis Mass Flow Meters and Controllers offer highest performance at the world’s lowest flow rates for both liquids and gases:

lowest range 50…5000 mg/h
up to highest range 2…200 g/h

The Coriolis sensor of the ML120 shows little to no variance over a long period of operation, thus reducing the system downtime.

Compact Coriolis Mass Flow Controller

The MFC contains a microprocessor based pc-board with signal and fieldbus conversion and an integrated digital controller for accurate mass flow control by means of the integrated piezoelectric control valve. The flow controller only requires (less than) 2 seconds to perfectly stabilize the flow. This makes the Coriolis MFC an ideal device for fast, repetitive dosing and filling processes for precursors, additives, solvents, etc.


  • Direct mass flow measurement, independent of fluid properties 
  • Fast response time
  • High accuracy (0,2% Rd for liquids, 0,5% Rd for gases)
  • Additional density and temperature outputs
  • Compact design with very small internal volume
  • Easy to install (low risk of gas bubble inclusion)
  • Multi-range: easy on-site re-ranging via digital interface (span 1:4000) 

"Multibus" Digital Mass Flow Meters/Controllers

ML120 Series mini CORI-FLOW™ Coriolis Mass Flow Meters / Controllers are offered with analog and digital communication, RS232 with optional fieldbus interface for CANopen®, PROFIBUS DP, PROFINET, DeviceNet, Modbus RTU/ASCII, EtherCAT or FLOW-BUS.


The instruments are suited for a variety of applications in:

  • Semiconductor processing
  • Solar cell and FPD technology
  • Food and pharmaceutical industries
  • Medical, microchemical or analytical installations
  • Calibration laboratories


For more information see our brochure:
"mini CORI-FLOW Series ML120 (Ultra) Low Flow Coriolis Mass Flow Meters / Controllers"

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